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The paper compares the residual stresses on TiN coatings applied to a substrate of hardened
and tempered 100Cr6 steel by physical vapor deposition (PVD) and plasma-assisted chemical vapor
deposition (PACVD) from the vapor phase. In both procedures, a TiN coating with a thickness of 1-2
m was applied to equally prepared substrate samples. The samples were tested for the permeability
of the coating according to the VDI 3822:2011standard, the thickness was determined by the calotest
and the residual stresses were analysed by the X-ray diffraction (XRD) method. The coating applied by
the PVD process showed better adhesion and three times lower residual stresses compared to the
coating applied by the PACVD process. On both coatings, the residual stresses are lower compared to
uncoated samples in the hardened and tempered state.
PVD; PACVD; TiN; 100Cr6 calotest; XRD analysis; residual stresses
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